用于低温半导体器件筛选的新型温度循环设备

NOVEL THERMAL CYCLE SCREENING EQUIPMENT FOR CRYOGENIC SEMICONDUCTOR COMPONENTS

在某些情况下斯特林制冷机采用间歇式工作方式,以延长卫星在太空中的服务年限,因此由斯特林机致冷的低温半导体器件如HgCdTe中长波红外探测器会经受成千上万次从-173℃以下到常温的温度循环,这个过程可能会造成器件的失效.为了研究器件的失效机理和可靠性,帮助筛选器件,本文介绍了一种自制新型的温度循环实验设备,型号TCE-a.经过数千次温度循环,设备满足器件筛选实验要求.

In order to prolong the lifetime of satellites, the Stirling cooler is operated on the intermittent mode in some cases. Thus such cryogenic semiconductor components as HgCdTe mid or long wavelength infrared （IR） detectors are subjected to thousands of repeated thermal cycles from below - 173℃ to room temperature. That may induce the failure of components. In this study, a novel equipment to study the reliability and the main failure mechanisms was introduced, which is used to screen semiconductor components. After thousands of cycles, the equipment meets the requirement of screening.