反应室沉积TiN／AlN复相陶瓷的研究

Study on Composite Ceramics TiN/AIN Depositing in Chamber

采用自蔓延高温合成与等离子喷涂相结合的方法在自制的反应室中沉积了TiN／AlN复相陶瓷。通过 XRD、SEM、TEM等手段对复相陶瓷进行了相分析、表面形貌及微观结构分析,结果表明,复相陶瓷主要由TiN和 AlN两相组成,但复相陶瓷粒子间的结合较差,没有明显的相界,TEM表明复相陶瓷有类似于羽毛状的形貌。

The composite ceramics TiN/AlN was deposited with self-propagating high-temperature synthesis combine and plasma spraying in the self-manufacturing chamber, The structure,surface morphology,microstmcture of composite ceramics were analyzed through XRD、SEM、TEM.The results show that the composite ceramics is made up of TiN and AlN,but integrating between grains of the composite ceramics is not good,without evident boundary,TEM shows that morphology of the composite ceramics resembles the shape of the feather.