摘要
采用蜗轮蜗杆驱动调整机构、使用同步带安装标准镜片方式、正交十字导轨支撑等可有效提高光学精密检测系统中大口径干涉仪装置的镜面面形质量、稳定性和调节准确度,从理论上介绍了蜗轮蜗杆驱动机构等设计原理及其基本公式,并从实验上验证了这些机构对光学精密检测系统稳定性的影响·
In this article, the adoption of gear/worm transferring, synchronous strip/gear installing method and perpendicular cross guiding rail which applied in the large aperture interferometer are described. By use of the method could be improved the system＇s stability and adjusting accuracy as well as the quality of the standard mirror face shape. The design principle and basic formulas of driving devices are introduced theoretically, and by experiments the devices＇ influence upon the stability of system is proved.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2006年第4期611-613,共3页
Acta Photonica Sinica
基金
国家863-416高技术计划资助项目
关键词
大口径干涉仪
蜗轮蜗杆驱动
同步带安装标准镜片
正交十字导轨
调整准确度
Large aperture interferometer
Gear/worm transferring
Synchronous strip/gear installing
Perpendicular cross guiding rail
Adjusting accuracy
