摘要
本文简单介绍了CVD的基本原理,评述了CVD在制备超细粉、高纯致密涂层/薄膜、高熔点高强度高模量陶瓷纤维/晶须。
The article introduces briefly the basic theory of CVD,reviews the application of CVD in making ultrafine powders,fibers/whiskers with high melting point and high strength and high modulus,high-purity and dense coatings/films and bulk ceramics.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
1996年第1期36-39,52,共5页
Bulletin of the Chinese Ceramic Society
关键词
CVD
涂层
陶瓷材料
沉积
CVD,ultrafine powders,fibers/whiskers,coatings/films,bulk ceramics