一种可控曲面光栅的研制

Fabrication of a controllable curved surface grating

提出了一种制作曲面变间距光栅的方法。首先在平面基片上制作光栅,然后通过一种高分子材料(PDMS)作为载体将光栅转移到曲面上,而事先涂在曲面上的混合溶胶-凝胶取代了传统的光刻胶,使得光栅的制作效率大大提高。采用这种方法在曲率半径为100 mm的凹球面基底上制作了平均线密度为80 l/mm的光栅,并用环境扫描电镜以及数字图像处理法检测了光栅的线密度分布。检测结果表明:光栅质量好,条纹清楚,衍射效率也没有降低。所制曲面光栅具有平面光栅和透镜两种光学器件的功能,可用曲面变间距光栅一种光学元件取代透镜和平面光栅两种光学元件,简化了光路,提高了制作效率,降低了成本。

A fabrication method of VLSG（Varied-line-space Grating） was presented. The grating was fabricated on plane substrate,and then it was transferred on curved surface by a macromolecule material（PDMS） used as a carrier. The hybrid gel film on curved surface can replace traditional light-sensitive lacquer,and improve the gratings stability. The VLSG with the line density of 80 l/mm was fabricated on a concave lens surface with curved radius of 100 mm. The grating line density distribution was detected with SEM and digital image process technique. For having the functions of the lens and plane grating, the results show that the high quality grating can replace lens and plane grating in good processing, efficiency and cost.