光学零件超声波清洗的应用现状及其发展

Application and development of supersonic cleaning optical elements

本文在概述超声波清洗机理之后，着重介绍了光学零件超声波清洗的应用现状及光学零件超声波清洗用的清洗剂、脱水剂、干化剂等清洗辅料的几个进展阶段，以及当前清洗辅料的研究动态及面临课题。

After the mechanism of supersonic cleaning is given in brief, the application of supersonic cleaning of the optical elements, the development stages of guidance materials used for supersonic cleaning of the optical elements, as well as research trends and problems faced at present in the cleaning material, are expounded.