低温等离子体的诊断方法

The Diagnostic Methods of Low-temperature Plasma

低温等离子体是空间主要环境之一,近年来也被广泛应用于能源、航空、环境科学、国防及材料表面改性等方面。详细的分析了等离子体诊断的常用方法和适用范围,认为准确进行等离子体诊断取决于两大因素,一是测量准确度(灵敏度),二是测试系统不对等离子体产生较大扰动。

The low-temperature plasma, one of the main space environments, has been widely used in the area of energy sources, aerospace, environmental sciences, national defence and surface modification of dielectric material. This paper introduces the common methods and applicable range of the plasma diagnosis in details. It is thought that diagnosing plasma accurately lies on two factors, one is the accuracy of measurement （sensitivity）, the other is the test system has no disturbances on plasma.