摘要
微光电子机械系统(MOEMS)已经在业界受到研究人员和相关人士的极大关注。文章介绍了MOEMS器件,主要就其制作工艺和封装技术做了讨论。其中,文章着重详细介绍了微光电子机械系统器件的封装工艺和相关技术。
Micro- optical -electro-mechanical-system （ MOEMS ） have received a great of interest and attention from research labs and from the industry. This paper proposes MOEMS devices, make process and packaging technology. And the packaging technology is introduced completely.
出处
《电子与封装》
2006年第4期18-22,17,共6页
Electronics & Packaging
