XRF系统灵敏度曲线的标定

The Sensitivity Calibration of the XRF Analysis Instrument

将整体会聚透镜0301组合到XRF分析系统,并使用最小焦斑为15的OXFORD高亮微聚焦X射线源作为光源．使用不锈钢合金、化合物、单元素3种薄膜标样标定了此XRF分析系统的灵敏度曲线,并对比了使用透镜和使用光阑两种情况下系统灵敏度曲线的不同．通过计算可知,X光透镜显著提高了系统的灵敏度,两种情况荧光产额数之比对于元素Ni最大,约为2 386;Se元素的比值最小,为575．

An X ray fluorescence analysis instrument, integrated with a monolithic X-ray focusing lens, is presented. It is characterized by its high power density and high space resolution. Further more, three film standard samples are used to perform the sensitivity calibration of the instrument. Comparisons of sensitivity are also made between the instrument with X-ray lens and without. The experimental results prove that the sensitivity of the instrument is significantly increased and experimental time is also obviously shortened.