摘要
提出一种带有杠杆机构的电容检测微型加速度计。通过外来加速度使质量块经杠杆将力放大施加到弹性梁上产生位移、改变检测电容间距得到与加速度成比例的电压信号,从而测出加速度大小。研究表明:这种加速度计的灵敏度可明显提高。同时采用有限元方法进行了仿真模拟,结果显示系统测量范围可达100 g、工作模态固有频率为209036 Hz。
The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection. The force applied to an elasticity beam was amplified through the lever. The distahoe of the capacitance was altered, therefore the voltage sign proportional to acceleration could be measured, thus showing the acceleration, and the sensitivity of the accelerometer is remarkably higher. Simulation was carried out with Ansys software, and its results indicate that the range of the micro-accelerometer is 100 g and that the natural frequency of work mode is 209036 Hz.
出处
《机械科学与技术》
CSCD
北大核心
2006年第3期281-283,共3页
Mechanical Science and Technology for Aerospace Engineering
基金
国防基础研究基金重点项目(J1500E002)资助
关键词
微型电子机械系统
电容检测
加速度计
仿真模拟
MEMS（ micro-electro-mechanical system）
capacitance
accelerometer
simulation
