谐振式SAW压力传感器敏感元件研究与设计

Study and Design Sensitive Device of Resonance SAW Pressure Sensor

量程和温度特性是传感器的两个主要指标,SAW压力传感器的量程由基片材料的结构尺寸决定,温度效应一般采用双端对谐振器来消除,目前关于两个谐振器的位置确定还没有一个确定的方法。通过力学分析得出了圆形石英膜片的半径、厚度、和最大载荷的关系;对石英圆形膜片的应力应变关系进行了有限元数值计算,得出了正负应力在圆形石英膜片的分界点,为设计SAW谐振式压力传感器的物理结构和合理的安排谐振器的位置提供了依据。

Measurement scale and temperature character are the key indexes in sensors. SAW pressure sensor＇s measurement scale is dicided by the structure and size of sensitive material base, temperature effect can be restrained by double resonator. In the present, there is no good method to design the position of two resonator. To get the relationship of radius, thickness and max-load , the physical model based on the circle quartz film is analysed. The area of the positive and negative stress is found by finite element method, which provide the theory for arranging the position of two resonators on circle quartz film.