用静电力和SAW滤波器对悬臂梁式SAW加速度计的扩程及其计量标定

On Enlarging Measure Range and Rectifying and Demarcating to the Accelerometer with Cantilever Beam

提出了用声表面波滤波器测知加速度方向和大小的原理和方法,研究了电容器中的静电吸引力对加速度计敏感质量块的位置稳定作用,以及用它扩大悬臂梁式加速度计量程的原理。还对静电力扩程之后,加速度计测量值的校准、计量标定等问题进行了有益地探讨,针对电容器静电力的非线性扩程特点,提出了查询表式的在线实时测量换算读值方案。

A new method using surface acoustic wave filter （SAWF） and electronic force in parallel-plate Capacitor for enlarging measure range of accelerometer with cantilever beam is put forward. The electronic force＇s stabilizing position function to sensitive mass block with negative feedback and the elementary principle for enlarging measure range are discussed. The rectifying and demarcating method to the accelerometer with cantilever beam are researched after enlarging measurement range. A plan about ＂Inquiring table on time for the measurement＂ is prompted.