非制冷式红外热像仪敏感元件动态特性的测试

Measurement of dynamic properties of sensitive elements in uncooled IR imaging systems

介绍了对微型机械结构(非制冷式红外热像仪的敏感元件)的动态特性的测试方法的研究.分别用谱平面光学滤波法和主动零差光纤干涉法对敏感元件进行了测试,并与有限元模拟计算的结果进行了比较,结果接近.并将后者制作成一种MEMS的微结构测试系统.通过对测试方法的研究,我们得到了一些对敏感元件的设计和评估有重要指导作用的动态参数,也得到了一种有效的MEMS微结构动态测试方法.

The testing methods for evaluating the dynamic characteristics of mieromechanical structures （the sensitive elements of uncooled IR imaging system） were reviewed. The sensitive elements were tested with spectra plane optic filtering method and active hornodyne demodulation optic-fiber interferometer method. The results were compared with the ones from FEM model analysis and good accordance was achieved. A micromechanieal structure test system for MEMS was then constructed with the latter method. Some important dynamic parameters were obtained from the study on the testing method, which can provide guidance for the design and evaluation of the sensitive elements, and an efficient micromechanical structure testing system for MEMS was also obtained.