摘要
文中着重阐述了基于微机电系统(Micro-Electro-Mechanical Systems,MEMS)技术制造的薄膜体声波谐振器/滤波器,简述了它的结构及原理,分析了其主要特征参数和设计方法,并设计了中心频率为2.4GHz,带宽为100MHz的带通滤波器,展示了薄膜体声波谐振器/滤波器的突出性能,为通信MEMS技术的微型化发展提供了更广阔的道路。
The principle and architecture of Film Bulk Acoustic Resonator/Filter are introduced in detail in this paper. Its main characteristics and design method are analyzed. Taking FBAR for example, a filter centering on 2.4GHz with 100MHz bandpass is designed to demonstrate excellent performance of FBAR filters,thus opening up a wider way for MEMS technology into telecommunication.
出处
《信息与电子工程》
2006年第2期157-160,共4页
information and electronic engineering
