摘要
建立了柔性铰链和复合柔性平行四析结构的力学模型．针对扫描探针显微技术（ＳＰＭ）的需要，给出了一种空间三维超精微定位机构及其控制系统．此定位系统行程１０μｍ，定位精度１０ｎｍ，定位分辨率２ｎｍ．
A theoretical model of the fie-cure hinge and compound fie-cure parallel four-bar mechanism is proposed. To meet the need of SPM (scanning probe microscopy), a new 3-D ultraprecise micro-positioning mechanism and its feedback control system were designed based on the above model. The positioning accuracy of the system is 10urn within 10Urn range, with a positioning resolution of 2nm.
出处
《天津大学学报》
EI
CAS
CSCD
1996年第1期1-6,共6页
Journal of Tianjin University(Science and Technology)
基金
国家教委"跨世纪优秀人才计划"基金
关键词
超精微定位
扫描探针显微术
微位移器
flexcure parallel four-bar mechanism, 3-D ultra-precise micro- positioning, nanotechnology
