摘要
为提高激光直写调焦系统的稳定性和响应速度,从弹性力学角度出发,对调焦执行机构微动台进行了力和位移关系的建模,并全面分析了其动态响应特性,动态特性分析为P ID调节提供了理论依据。在P ID校正中着重加强微分超前调节作用,缓解了系统相位滞后的问题,从而使系统得到较好的稳定度和响应速度。通过激光直写试验验证调焦系统的调焦精度为0.2μm。
To improve the focusing systematic stability and response speed of the laser direct writing system, a reasonable modeling for strength and displacement relation of the micro-actuator, which is the executive body in the focusing system, was proposed based on elastic mechanics. Full analysis of the dynamic response characteristics have been done, which provides a theoretic evidence for PID adjustment. It focuses on differentiation in PID adjustment, amends the phase lag problem and gets better systematic stability and response speed. Experience on the laser direct writing system, we got that the precision of the focusing system is 0.2μm.
出处
《光学仪器》
2006年第2期56-60,共5页
Optical Instruments
关键词
微动台
动态响应
调焦系统
激光直写
micro-actuator
dynamic response
focusing system
laser direct writing system
