摘要
介绍了近年国际上压电型精密驱动器的典型结构、工作原理和特点。在此基础上,提出一种新颖的以压电叠堆为驱动元件的整体对称结构的精密直线驱动器。这种整体对称结构采用双侧对箝、精调斜块对及整体加工等独特的结构和工艺手段,保证了驱动器工作的稳定性和准确性。对该步进型精密直线驱动器进行了大量试验,说明驱动器具有实用性。
Enumerating recently international typical structure of sophisticate piezoelectric actuator and analyzing their working principle and character, based on it, a novel sophisticate linear piezoelectric actuator of symmetric structure on base of piezoelectric stack as drive element was proposed. The symmetric structure in entity applied unique structure and technics method such as double extrusion,sophisticate slant gage block and entire processing and so on. A number of experiments on stepping model linear piezoelectric actuator prove practical signification of actuator.
出处
《微电机》
北大核心
2006年第2期71-73,102,共4页
Micromotors
基金
国家"863"计划项目(2002AA423150)
国家自然科学基金项目(50475010)
关键词
直线驱动器
压电叠堆
柔性铰链
精密驱动
结构
Linear actuator
PZT stack
Flexible hinge
Sophisticate drive
Structure