径向剪切干涉波面重建法检测非球面透镜

The Method of Radial Shearing Interferometry and Reconstruction of the Wavefront for Checking and Testing the Aspheric Lens

用共光路径向剪切干涉法来测量非球面透镜的波面。该方法通过波带板将待测波面分离成放大或缩小倍数不同的两波面进行径向重叠,在叠加区域实现剪切干涉。对干涉条纹,利用SCPM求取两波面位相差,在极坐标中将位相差径向迭加得到原始波面位相分布。该方法具有精度高、不损坏透镜镜面、适合用于实时检测等优点。

Using the radial shearing interferometry that has the same optical path to measure the wavefront of aspheric lens,in this method the zone plates can split the original wavefront into two wavefronts that have different amplificatory multiple or contractible multiple. And there will be a intcrferogram when the two wavefronts make the radial shearing interference in their overlap area. The phase difference of the two wavefronts will be calculated by using SCPM, and the phase of original wavefront will be getted through adding the phase difference along the radial direct in the polar coordinates. This method has the advantage of high precise,real time measurement,not destorying the shape of the lens and so on.