激光衍射图样识别法检验光学零件表面疵病

Defects inspection of optical,surface by recognizing laser diffraction patterns

本文提出了一种光学零件表面疵病检验方法。通过识别表面疵病的激光衍射图样,进行疵病种类和尺寸的自动检验。采用自旋光线扫描,显著的提高了擦痕的检验信噪比。研制出了实验装置,获得了较好的实验结果。

A method of optical surface defects inspection was proposed,which can classify the de- fects by shape and size by recognizing the diffraction patterns of the defects.As the inspecting light spot take the shape of a sharp line,which spin while scan the optical surface,the signal-to-noise of the in- spection of scratches was obviously improved.The experimental setup was described,and the results of the experiment was satisfactory.