摘要
In this paper, we analpe and discuss the characteristic Ptopnies and using petormanoo ofseverai types of ultraviolet source, transdslon materials and optical mask which are used in the pho-toetch technology of coding compoent.
In this paper, we analpe and discuss the characteristic Ptopnies and using petormanoo ofseverai types of ultraviolet source, transdslon materials and optical mask which are used in the pho-toetch technology of coding compoent.
出处
《长春光学精密机械学院学报》
1996年第2期52-57,共6页
Journal of Changchun Institute of Optics and Fine Mechanics
