压电驱动微泵泵膜振动有限元分析

FINITE ELEMENT ANALYSIS OF THE MEMBRANE OSCILLATION OF THE PIEZOELECTRIC MICRO-PUMP

以压电驱动微泵泵膜为研究对象,分析了压电复合泵膜膜片的弹性曲面微分方程,建立了泵膜膜片有限元数值模拟的模型,对泵模膜态进行了计算和分析,模拟并分析了驱动电压、泵膜压电层半径与泵膜单晶硅层半径之比、单晶硅层厚度、压电层厚度对泵膜位移的影响。所作研究为压电驱动微泵的优化设计提供了理论依据。

The micro-pump membrane is the research object. The elastic differential equations are analyzed, the model of the micro-pump membrane is established for the numerical simulation by finite element method, the oscillation modes of the micropump membrane are calculated and studied. The influence of the driven voltage, the radius ratio of the piezoelectric layer to the single wafer, the thickness of the single wafer, the thickness of the piezoelectric layer on the displacement of the micropump membrane are simulated and analyed. The results are very helpful for the optimization design of the piezoelectric micropump.