准分子激光加工工艺参数与修饰表面形貌参数的关系

The Relationships of Excimer Laser Processing Parameters and Modified Surface Topography Parameters

表面微观形貌修饰是改善和控制表面微摩擦性能的一种方法。采用准分子激光表面形貌修饰技术在A l2O3陶瓷材料表面构建微观形貌,通过改变准分子激光加工工艺参数,探讨了准分子激光加工表面形貌参数(包括粗糙度参数和分形参数)与加工工艺参数的相关关系。研究表明:准分子加工工艺参数与表面形貌参数之间存在相关性,轮廓高度算术平均值、轮廓高度均方根值、坡度均方根值和分形维数与激光能量密度成正比,承载量系数与激光能量密度成反比;随着激光能量密度的增大,表面形貌的起伏程度和致密程度增大、陡峭程度有细微的变化、承载面积比减小。

Modifying surface topography can be used to decrease and control the micro tribological behavior. Excimer laser texturing was performed on the surfaces of Al2O3 ceramic with a various of processing parameters. The relationships of modified surface topography parameters and excimer laser processing parameters were analyzed. The results indicate that there are relationships between the excimer laser processing parameters and the modified surface topography parameters. The energy density of excimer laser is direct ratio to profile height arithmetic average, equal-root value and fractal dimension, and inverse ratio to carrying capacity coefficient. With the increase of laser density, the wave and delicate degree is increased, the sharp degree changes a little, the proportion of carrying area is decreased.