摘要
本文分析了光电式传感器在模拟式工作状态下难于实现高精度测量的原因,提出了通过自校正提高测量精度的方法。通过卷绕式连续真空镀膜膜厚测量的实例,证明效果良好。
This paper analyses the difficulty of high accuracy measurement of photoelectric sensors working under on-line analogue conditions and proposes a method for the accuracy improvement. Its practical application in measurement of films formed by winding and continuous vacuum film deposition shows that this method is effective.
出处
《仪表技术与传感器》
CSCD
北大核心
1996年第8期17-18,28,共3页
Instrument Technique and Sensor
关键词
光电式传感器
传感器
测量
Photoelectric, Sensor, Disturbance, Self-Correction.