摘要
主要介绍建立在微电子机械系统技术基础上的现代传感器技术，显示了它对改造航天、航空、军事科学与国民经济的能力与未来发展的深远影响。例举了几种典型的微机械结构传感器，并通过这些实例介绍了微电机械系统的设计与典型的微机械制造工艺技术。
The modern technology which based on the mi cro-electro-mechanical systems (MEMS) is mainly introduced. The great influence on the improvement of space.aeronautics. military technology and national economics has been demonstrated. The several typical micro-mechanical structure sensors as examples to introduce the designing and typical micro-mechanical process technology of MEMS is illustrated.
出处
《测控技术》
CSCD
北大核心
1996年第4期5-9,共5页
Measurement & Control Technology
