摘要
激光光纤测振仪将直径小于200μm的激光光斑会聚于Si微悬臂梁和AFM探针上，分别由静电场和PZT进行激振，实现了激光微结构振动特性非接触测量，并给出了测量结果。
Laser fibre optic vibration focuses the laser spot with less than 200 μm on Simicrocantilever and AFM probe exited by static field and PZT. The non-contact measurement for thevibration characteristics of laser microstructure is realized and measuring results are given.
出处
《航空计测技术》
1996年第3期3-6,共4页
Aviation Metrology & Measurement Technology
关键词
激光测振仪
微梁
AFM探针
光纤
测振
振动特性
Laser optic fibre, Vibration characteristics, Vibration characteristic
