摘要
结合MEMS微传感器和无线通信技术,研究了MEMS微加速度计检测信号的测量与无线传输技术,制定了二维加速度信号的无线测量系统方案,设计了系统电路,并完成了原型装置的制作与调试。实践表明,本系统能对微弱的加速度进行无线检测,有较高的测量精度和灵敏度。
Based on the wireless communication technique and MEMS, the signal measuring of MEMS-based micro accelerometer and transmission by wireless were analyzed, and the wireless measuring system is developed. The system hardware testing principles and designing rules are discussed, and the software flow of system is given. Acceleration is tested with the wireless measuring system. The research result shows that the system can be used in wireless measurement of the weak acceleration with a reasonable accuracy and sensitivity.
出处
《微纳电子技术》
CAS
2006年第5期254-257,共4页
Micronanoelectronic Technology