多晶金刚石锥状场发射阵列冷阴极研究

THE INVESTIGATION OF PYRAMID-SHAPE POLYCRYSTAL DIAMOND FIELD EMITTER ARRAY COLD CAIHODE

本文报导了一种新型金刚石场发射阵列冷阴极的制造方法和电子发射性能，通过数据分析得到了这种金刚石场发射体的有效表面功函数和总有效发射面积，并与用其它方法获得的几种膜的发射性能作了比较。测量结果表明，这是一种很有应用潜力的制造方法。

This paper describes a novel fabricating method of diamond field emitter arrayDFEA)cold cathode and its characteristic of electron emission. Using data analyzing technique,the effective surface work function and the total effective emission area of DFEA are given, and compared with the corresponding parameter of field emission array coated with diamond-containing material deposited by ion beam aassisted deposition(IBAD).The results show that this fabrication method has a strong application potential for electron emitter.