HgCdTe表面钝化──阳极氟化的初步研究

INVESTIGATION OF HgCdTe SURFACE PASSIVATION──PBELIMINARY STUDY OF ANODIC FLUORIDIZATION PROCESS

本文尝试采用非含水的ＮＨ４Ｆ或ＫＦ以及含水的ＫＦ电解质溶液对Ｈｇ（１－ｘ）ＣｄｘＴｅ（ｘ＝０．２）表面的阳极氟化进行了研究，着重分析了阳极氟化膜生长的基本过程及其机理，讨论了阳极氟化条件及工艺对薄膜组成及质量的影响。

A novel anodic fluoridization process using nonaqueous NH_4 F or KF and/or aqueous KF electrolute for forming native fluoride films on Hg(1-x)CdxTe(x=0.2)is described. The principal anodic fluoridization process and its mechanism are analyzed with emphasis. The effect of the growth condition on the film composition and quality is discussed.