摘要
论述了声表面波气体传感器器件的结构设计及设计参数的选择,设计了ST和AT不同切向的石英晶体材料做压电基片材料的3种振荡器,通过电性能参数的测试,比较了3种振荡器的性能优劣。
The paper studied the effects of the SAW chemical warfare detector＇s designing. ST quartz and AT quartz were used for substrate of three types of SAW oscillators. The oscillators are designed, fabricated and tested. We selected the optimized SAW oscillators to be SAW devices through experiments.
出处
《舰船科学技术》
北大核心
2006年第2期72-75,共4页
Ship Science and Technology
关键词
声表面波
气体传感器
振荡器
surface acoustice wave
chemical gas sensor
oscillator
