摘要
CN膜是一种超硬新材料,其性能特点及制备方法已成为材料科学研究的热点。概述了CN膜的制备方法,并介绍了CN膜结构及性能的研究概况。
CN film is one kind of new superhard materials. The study on
the deposition processes and properties of CN films have drawn wide interest in the world. Resent progress in the research on the deposition processes, structure and properties of CN films is reported
出处
《材料导报》
EI
CAS
CSCD
1996年第6期40-44,共5页
Materials Reports
关键词
超硬材料
CN膜
制备
薄膜
superhard materials,CN film,deposition process, properties
