摘要
利用现代激光蒸发薄膜沉积技术，完成了Sc2O3＋W薄膜的沉积实验研究，并应用于薄膜型钪系阴极的研制。初步实验表明，这一方法具有稳定、易控、省时、省料和工艺重复性好的优点。所研制的阴极显示了优异的发射性能和良好的激活与耐高温特性。
A new coating technology the laser beam evaporation technique has, in the first time,been introduced to produclng scandium oxide coating on Sc-type cathode. It has been evidenced by XPS analysis that the scandium existed 1n full oxide state in the coated film,with no necessory of introducing active gasesor other oxidation treatments during coating. In this work,a close correlation has been found between the surface atomic rations of Sc/W and Sc/Baand the cathode emission properties- As the surface compositions and their maintenance during over heatingrely,to a large extent,on the thickness of the coating films,this kind of SC type cathode exhibits better controllability in manufactoring and higher resistence to poor working conditions than normal scandate
出处
《真空科学与技术》
CSCD
1996年第1期10-17,共8页
Vacuum Science and Technology
基金
电子工业部电子科学研究院军事电子预研基金!J93
0704
关键词
激光蒸发技术
钪系
阴极
发射性能
真空电子器件
Laser beam evaporation, Sc-type cathode, Surface analysis, Emission property
