氧化锡基ZnO/SnO_2 UPF复合工艺对其微观结构的影响

EFFECT OF ZnO/SnO_2 UPF COMPOUND TECHNIQUE ON ITS TOPOGRAPHY AND CRYSTAL PHASE

着重讨论了用直流气体放电活化反应蒸发沉积法制备的氧化锡基ZnO／SnO2超微粒子薄膜（UPF）的制备工艺对其物相结构及表面形貌等的影响。结果表明：复合型薄膜上层的ZnOUPF比单层薄膜的ZnOUPF致密；主要晶相成分为SnO2相，并沿（002）、（110）、（101）等晶面择优生长；ZnO相呈非晶态结构。

ZnO-SnO2 substrate UPF (ultrafine particle film) prepared in our laboratory has excellent sensitivity and selectivity. Here,the relationship between its micrography,crystal phase and processing condi tion was discussed. The results show that the grains of the top-layer ZnO UPF are denser than that of single ZnO UPF;the main crystal phase is SnO2 with preferential growth in the directions of (002), (110), (101 );ZnO phase also exhibits an amorphous structure.