摘要
渡边文夫对极高真空(XHV)测量的系统而有成效的研究,受到国际同行的注目,其中最有实用价值和创新意义的是离子谱规,此规大大降低了X射线效应、电子激励解吸效应和热出气效应,可测量10-12Pa的XHV。本文试图较全面地评介渡边文夫的XHV测量研究工作,以资借鉴。
The systematic and fruitful study of Fumio Wantanabe on XHV measurement is comprehen sively examined and reviewed. Of all his work,to which has been paid great attention by international XHV researcheFs,the most practical and creative one is ion spectroscopy gauge which substantially reduces X-ray ef fect and heat outgassing effect,and avoids ESD errors caused by ESD ions down to 10-12 Pa
出处
《真空科学与技术》
CSCD
1996年第3期179-184,共6页
Vacuum Science and Technology
关键词
极高真空
真空测量
离子谱规
XHV,Vacuum measurement,Ion spectroscopy gauge