渡边文夫的极高真空测量研究评介

REVIEW OF F. WANTANABE′S STUDY ON XHV MEASUREMENT

渡边文夫对极高真空（XHV）测量的系统而有成效的研究，受到国际同行的注目，其中最有实用价值和创新意义的是离子谱规，此规大大降低了X射线效应、电子激励解吸效应和热出气效应，可测量10-12Pa的XHV。本文试图较全面地评介渡边文夫的XHV测量研究工作，以资借鉴。

The systematic and fruitful study of Fumio Wantanabe on XHV measurement is comprehen sively examined and reviewed. Of all his work,to which has been paid great attention by international XHV researcheFs,the most practical and creative one is ion spectroscopy gauge which substantially reduces X-ray ef fect and heat outgassing effect,and avoids ESD errors caused by ESD ions down to 10-12 Pa