原子团离子在Al_(x)Ga(1-x)As基体组分SIMS定量分析中的应用

APPLICATION OF CLUSTER IONS IN QUANTIFICATION OF Al_xGa_(1-x)As COMPOSITIONS USING SIMS

通过检测原子团离于MCs+和MAs－（M是基体元素）对AlxGa1-xAs基体组分进行了定量的分析，考察了MIQ－156SIMS上所测这些原子团离子的能量分布及其对分析结果的影响，并对正、负SIMS测量方法做出比较。

Quantification of AlxGa1-xAs matrix compositions by detecting MCs+ and MAs- clusterions (M is matrix element)using SIMS is studied in this paper. Energy distributions of cluster ions andtheir influence on the analysis results have been investigated. The two methods based on positive SIMS andnegative SIMS have been compared.