溶胶－凝胶法制备MoO_3陶瓷薄膜

MoO_3 CERAMIC FILM PREPARED BY SOL-GEL PROCESS

以用酸钠为原料，乙二醇为溶剂，用溶胶－凝胶法制备ＭｏＯ３薄膜通过对干凝胶粉做ＤＴＡ和ＴＧ分析，用ＳＥＭ和ＸＲＤ分析还胶膜、热处理后氧化物膜及多次重复浸涂热处理薄膜的显微结构和晶相组成，研究了氧化物薄膜的形成过程．重复４次浸涂热处理可得到约２μｍ厚连续致密的、主晶相为择优取向的斜方ＭｏＯ３薄膜．

MoO3 ceramic film was prepared through a sol-gel process by using ammounium paramolybdate as a starting material and ethylene glycol as a dissolvent. TG-DTA analysis of a xerogel was done. Microstructures and crystal compositions of a gel film and oxide films were studied by SEM and XRD.The oxide films were either obtained by one-time heat-treatment or by multi-time dip and heat-treatment.The dense and continuous MoO3 film with thickness of about 2μm was prepared by 4-time dipping and heat-treating. Main crystalline phase of the film was orthorhombic MoO3 with preferred orientation.