摘要
实验证明Ti—Al-N系功能梯度薄膜在厚度方向上有金属Al,(Ti,Al)N和(Ti_2Al)N(110)三种相结构,在(Ti,Al)N相中又有(111)和(200)两种择优取向.随着氮分压PN的不断增加,薄膜中金属相含量急剧下降,陶瓷相含量则急剧增加,当PN>1.5Pa后两种相含量的变化均趋平缓.
The phase structure and distribution along the thickness direction of Ti-Al-N functional gradient coatings were studied in this paper.It is shown that there are three phases,Al,(Ti,Al)N and (Ti2Al)N,in the Ti-Al-N functional gradient coatings,and there are two competitive preferred orientations,(111)and(200)textures in(Ti,Al)N,With increasing the nitrogen pressure,the content of metal phase decreases greatly and the content of ceramic phase increases greatly,and when PN≥1.5Pa the change of metal and ceramic becomes very slowly.
出处
《材料研究学报》
EI
CAS
CSCD
1996年第3期310-312,共3页
Chinese Journal of Materials Research
关键词
功能梯度
薄膜
相结构
相分布
钛铝氮系
functional gradient coatings Ti-Al-N phase structure and distribution