Ti－Al—N系功能梯度薄膜的相结构

PHASE STRUCTURE AND DISTRIBUTION OF Ti-AI-N FUNCTIONAL GRADIENT COATINGS

实验证明Ｔｉ—Ａｌ－Ｎ系功能梯度薄膜在厚度方向上有金属Ａｌ，（Ｔｉ，Ａｌ）Ｎ和（Ｔｉ＿２Ａｌ）Ｎ（１１０）三种相结构，在（Ｔｉ，Ａｌ）Ｎ相中又有（１１１）和（２００）两种择优取向．随着氮分压ＰＮ的不断增加，薄膜中金属相含量急剧下降，陶瓷相含量则急剧增加，当ＰＮ＞１．５Ｐａ后两种相含量的变化均趋平缓．

The phase structure and distribution along the thickness direction of Ti-Al-N functional gradient coatings were studied in this paper.It is shown that there are three phases,Al,(Ti,Al)N and (Ti2Al)N,in the Ti-Al-N functional gradient coatings,and there are two competitive preferred orientations,(111)and(200)textures in(Ti,Al)N,With increasing the nitrogen pressure,the content of metal phase decreases greatly and the content of ceramic phase increases greatly,and when PN≥1.5Pa the change of metal and ceramic becomes very slowly.