摘要
表面氧污染的钛膜，其吸氢能力比清洁钛膜降低达数倍之多。在厚度d为40nm，表面氧污染的钛膜表面上，重新蒸镀一层极薄的（约1．2nm）清洁钛膜，吸氢、释氢的测量表明其吸氢能力得到恢复。另外，还对其他四块不同厚度的钛膜，在表面清洁及氧污染的条件下，分别进行了吸氢能力实验。实验结果证实：氧污染降低钛膜吸氢能力的原因是使钛膜上氢分子解离的位置减少，而不是扩散阻挡层的作用。
Small amounts of Ti(~1. 2 nm) were coated on top of Ti thin film with thickness of 40 nm which was contaminated by oxygen. It can result in a recovery of the absorption capability of H2. Four Ti films with different thicknesses were prepared for hydrogen absorption and desorption experiment under clean and contaminated surface conditions. The results show that the oxygen contamination decreases the number of the dissociative sites for hydrogen and then reduces the hydrogen adsorption ability.
出处
《真空科学与技术》
CSCD
1995年第6期397-400,共4页
Vacuum Science and Technology
基金
中国工程物理研究院基金
关键词
钛膜
氧污染
吸氢能力
扩散阻挡层
吸气材料
Ti film, Oxygen contamination, Capability of hydrogen absorption, Diffusion barrier
