高精密小型动压悬浮自动流延机的设计

Design of High Precision Automatic Ceramic Tape Casting Machine Based on Hydrodynamic Float Mechanism

电子陶瓷薄膜是片式电子元器件制造和大规模集成电路封装的关键薄膜材料,它是在高精密流延机上利用电子陶瓷浆料流延获得的。因此,如何设计与制造高精密自动流延机是保证流延膜的生产质量与效率的关键。文章提出了一种基于非牛顿液体动压悬浮理论的高精密陶瓷薄膜流延方法,并设计了小型全自动流延机。对小型流延机的系统构成、成膜原理、流延膜的传输运动、干燥原理、浆料的供给和系统的控制,以及它们的机械实现等问题进行了分析和探讨。

Electronic ceramic thin tape is a kind of key materials for electronic chip components fabrication and IC packaging. They can be cast by the use of electronic ceramic slurry in a high precision tape casting machine. Therefore, however high precision Automatic tape casting machine is designed and manufactured is a very important to the quality and productivity of ceramic tape. In this paper, a new ceramic tape casting method is given on bases of the hydrodynamic float mechanism of Non - Newton liquid, and a small tape casting machine is designed including, the construction, casting mechanism and environment, tape motion, drying methods, slurry supply and electronic controls of the tape casting machine that is used for manufacturing thin ceramic sheets of chip capacitors are analyzed and researched.