一种可用于原子全息光刻的二元计算全息新方法

A binary computer generated hologram method for atom hologram lithography

原子全息光刻即采用二元计算全息片掩模来操纵原子,实现微细结构的制作。传统二元计算全息产生的全息片在重现时会产生不止一个实像,这对于原子全息光刻的操作是不利的。提出了一种非相位编码的方法,该方法利用基元函数叠加方式产生实的编码前全息图,再利用类似罗曼Ⅲ型的编码方式产生二元计算全息图。模拟结果表明,利用该方法产生的掩模板可以产生单一的同原始图案相对应的微细结构。

Atom hologram lithography employs binary computer generated hologram to handle atoms for making microstructure. The conventional binary hologram is inconvenient because it often has more than one reconstructed images. A new method of amplitude-only encoding is investigated. A hologram is formed by adding together a series of elementary functions, and then it is encoded with Lohmann Ⅲ like encoding to obtain a binary computer generated hologram. A simulation result shows that the mask made with the new method could produce a unique microstructure according to the original pattern.