透紫外隔热银基复合多层膜的结构设计和光学性能

The Silver-Based Composite Multilayer for Ultraviolet Transmittance and Heat Insulation Design and Its Optical Properties

综合分析材料的能带结构及内光电效应,利用金属膜诱导透射定理设计并制备了几种透紫外隔热纳米多层膜.该多层膜系具有较高的近紫外透过率和优异的红外反射性能,在紫外固化的应用峰值365 nm处透射率高达80%,而对于波长在1 600 nm的红外波段反射率超过了90%,可用于紫外固化中有害热量的防护,提高固化质量.采用传统的真空蒸镀工艺获得较好膜层质量,膜系采用非晶TiO2与金属Ag交替生成TiO2/Ag/TiO2三明治结构.对比分析了膜层结构对其光学性能的影响,并利用变角椭圆偏振仪(VASE)分析了多层膜的界面。结果表明,Ag/TiO2界面明晰,无过渡层和界面反应层.

A couple of multilayer structures for ultraviolet （UV） transmittance and heat insulation were designed and fabricated in terms of the induced transmittance theorem of metal films after a comprehensive analysis on materials band structure and internal photoelectric effects. The multilayer shows excellent near UV transmittance and IR reflectivity and it can be applied in UV curing for heat insulation and quality improvement. The peak value of UV transmittance at 365 nm is about 80% and the IR reflectivity at 1 600 nm is over 90% in the optimized structure. This multilayer system is deposited with amorphous TiO2 and Ag alternately by conventional evaporation. The effect of multilayer structure on optical properties was investigated. The spectroscopic ellipsometry（SE） analysis indicates that the interface of Ag/TiO2 is sharp without transition layer and interface reaction.