离子镀装饰膜厚度测量技术

Technology of the Thickness Measurement of the Ion Plating Decorative Film

本文首次利用Ｍｉｃｈｅｌｓｏｎ干涉仪对多弧离子镀ＴＩＮ装饰膜厚度进行了精确测量，该方法原理简单，测量精度高、可重复性强．是装饰膜厚度测量的最佳方法．

in this Paper,Michelson interferometer is used tO measure the thickness of TiN decorative film precisely(which is made by Multi-arc ion plating)for the first time. This methed has such advantages as high precision in measurement, Simplicity in principles and being strong in repesting. It will be the best way to measure the thickness of the decorative film.