5SUNG W P, CHUL B K, SANG Y K, et al. Design of experimental optimization for ULSI CMP process applications [J] . Microelectronic Engineering ,2003,66(1-4) :448-495.
6SONG M Y, MANAUD J P, DARRIET B. Dehydriding kinetics of a mechanically alloyed mixture Mg-10wt% Ni [J]. J of Alloys and Compounds, 1999,282 (1-2) : 243-247.
7LUNDER O, LEIN J E, AUNE T K, et al. The roll of Mg17Al12 phase in thecorrosion of mg alloy AZ91 [J]. Corrosion, 1989,45 ( 9 ) : 741-748.
8BELDJOUDI T, FIAUD C, ROBBIOEA L. Influence of homogenizationg and artificial aging heat treatments on corrosion behavior of Mg-Al alloys [J]. Corrosion, 1993,49 (7) :738-745.
9LEE D H,KWON D J. A 3D numerical study of the polishing behavior during an oxide chemical mechanical planarization process [ J ]. Key Engineering Materials, 2004,4 ( 257/258 ) : 433 - 440.
10LIU R C, PAl C S, MARTINEZ E. Interconneet technology trend for microelectronics [J]. Solid-State Electronic, 1999,43: 1003 - 1009.