亚波长设计中的可制造性验证方法(英文)

Method of Verification for Manufacturing in Sub-Wavelength Design

描述了一种采用分辨率提高技术后用于可制造性设计的验证方法.该方法的目的是验证设计功能与设计目的是否一致,更精确地说,使刻印出来的图像与设计一致.还描述了这种基于模型的验证方法的过程建模,实例说明这种方法的性能.

We describe a post resolution-enhancement-technique verification method for use in manufacturing data flow. The goal of the method is to verify whether designs function as intended,or more precisely, whether the printed images are consistent with the design intent. The process modeling is described for the model-based verifi cation method. The performance of the method is demonstrated by experiment.