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一种基于MEMS的射频低相位噪声压控振荡器的研制 被引量：2

Development of a MEMS-Based RF Low-Phase-Noise Voltage Controlled Oscillator
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摘要 利用微机械可变电容作为频率调节元件,制备了一种中心频率为2GHz的LCVCO.微机械可变电容的控制极板与电容极板分离,并采用表面微机械工艺制造,在2GHz时的Q值最高约为38·462.MEMSVCO的测试结果表明,偏离2·007GHz的载波频率100kHz处的单边带相位噪声为-107·5dBc/Hz,输出功率为-13·67dBm.对微机械可变电容引起的机械热噪声以及减小空气压膜阻尼来降低相位噪声的方法进行了讨论,提出了一种优化阻尼孔数目的方法. A 2GHz LC VCO is fabricated using a micromachined variable capacitor for frequency tuning. The MEMS variable capacitors,whose controlling plates and capacitor plates are separated, are fabricated in a surface micromachining process. These devices have a quality factor of 38. 462 at 2GHz. The MEMS VCO operating at 2. 007GHz achieves a single side band phase-noise of - 107. 5dBc/Hz at a 100kHz offset from the carrier and an output power of - 13.67dBm. On the basis of analysis of VCO mechanical-thermal noise produced from the micromachined variable capacitor,a method for lowering the phase noise by reducing the squeeze damping is proposed and an optimized number of damoing holes is obtained.
作者 李丽 赵正平 张志国 郭文胜 吕苗 杨瑞霞
机构地区 河北工业大学信息工程学院 中国电子科技集团公司第十三研究所 中国电子科技集团公司第十三研究所
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第5期900-904,共5页 半导体学报（英文版）
基金 电子元器件可靠性物理及其应用技术国防科技重点实验室基金资助项目(批准号51433040204DZ2301)~~
关键词 MEMS 可变电容 Q值 压控振荡器 相位噪声 MEMS variable capacitor quality factor VCO phase noise
分类号 TN753.9 [电子电信—电路与系统]
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参考文献9

  • 1梁雪冬,刘泽文,刘理天,李志坚.高调节范围RFMEMS压控电容的设计与模拟[J].Journal of Semiconductors,2003,24(B05):179-182. 被引量：1
  • 2李丽,张志国,邓海丽,赵正平,杨瑞霞.射频微机械可变电容的研究与进展[J].半导体技术,2005,30(5):35-39. 被引量：2
  • 3Young D J, Boser B E. A micromachine-based RF low-noise voltage-controlled-oscillator. Technical Digest of Custom Integrated Circuits Conference, Santa Clara,CA , 1997:431
  • 4Young D J,Mabla V,Ou J J,et al.A low-noise RF voltage-controlled oscillator using on-chip high-Q three-dimensional coil inductors and micromachined variable capacitor. Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 1998:128
  • 5Young D J,Tham J L,Boser B E. A micromachine-based low phase-noise GHz voltage-controlled oscillator for wireless communications. Technical Digest of the 10th International conference on solid-state sensors and actuators, Sendai, Japan, 1999:1386
  • 6Dec A,Suyama K. Micromachined electro-mechanically tunable capacitors and their applications to RF IC's. IEEE Trans Microw Theory Tech, 1998,46(12):2587
  • 7Dec A,Suyama K. A 1.9-GHz CMOS VCO with micromachined electromechanically tunable capacitors. IEEE J Solid-State Circuits,2000,35(8):1231
  • 8Dec A, Suyama K. Microwave MEMS-based voltage-controlled oscillators. IEEE Trans Microw Theory Tech, 2000,48(11) :1943
  • 9Leeson D B. A simple model of feedback oscillator noise spectrum. Proceedings of the IEEE, 1996,54(2) :329

二级参考文献15

  • 1LARSON L E, HACKETT R H, MELENDES M A, et al. Micromachined microwave actuator(MIMAC) technology-a new tuning approach for microwave integrated circuits[A]. IEEE Microwave and Millimeterwave Monolithic Circuits Symposium[C]. Boston,Massachusetts, USA, 1991.27-30.
  • 2YOON J B,NGUYEN C T.A high-Q tunable micromechanical capacitor with movable dielectric for RF applications[A]. IEEE Int Electron Devices Meeting[C]. San Francisco, California, USA, 2000.489-492.
  • 3YAO J J, PARK S, DENATALE J. High tuning ratio MEMS based tunable capacitor for RF communications applications[A]. IEEE Proc of Solid-State Sensors and Actuator Workshop[C].Washington DC,1998.124-127.
  • 4SEOK S, CHOI W, CHUN K. A novel linearly tunable MEMS variable capacitor[J].J Micromech Microeng,2002,12(1):82-86.
  • 5YOUNG D J, BOSER B E. A micromachined variable capacitor for monolithic low-noise VCOs[A].Tech.Digest of Solid-State Sensors and Actuator Workshop[C].Hilton Head Island, SC, 1996.86-89.
  • 6BAKRI-KASSEM M, MANSOUR R R. An improved design for parallel plate MEMS variable capacitor[A].IEEE-MTT, Int. Microwave Symposium,IMS2004[C].Forth Worth, TX, USA, 2004.865-868.
  • 7BAKRI-KASSEM M, MANSOUR R R. Two movableplate nitride-loaded MEMS variable capacitor[J].IEEE Trans on Microwave Theory And Techniques, 2004,52 (3):831-837.
  • 8DEC A, SUYAMA K. Micromachined electro-mechanically tunable capacitors and their applications to RF IC' s[J]. IEEE Tran Microwave Theory and Tech,1998,46 (12):2587-2596.
  • 9ZOU J, LIU C, CHEN J, et al. Development of a wide tuning range MEMS tunable capacitor for wireless communication system[A]. Technical digest of International Electron Devices Meeting[C]. San Francisco,CA,2000.403-406.
  • 10PEROULIS D, KATEHI L P B. Electrostatically-tunable analog RF MEMS varactors with measured capacitance range of 300%[A]. Int MTT-s Digest of Microwave Symposium[C]. Philadelphia, PA, USA,2003.1793-1796.

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二级引证文献14

Journal of Semiconductors
2006年 第5期

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