摘要
以荫罩刻蚀线的刻蚀腔体内的摇摆电机控制对象为对象,采用了B＆R的PCC和 ACOPOS伺服控制器,对同步电机进行运动控制,使摇摆腔体内电机能快速、稳定地跟随设定曲线,并按照设定曲线运动。PCC中PVI使PCC方便地与上位机进行通信;PowerLink使伺服间的通信实时快速;PCC的高级编程语言C使PCC完成传统PLC不能完成的高级应用,如曲线的生成;而虚轴概念的引入更是提高了电机运行的可靠性。
A etch line is introduced. The B＆R PCC and ACOPOS servo are used to control the synchronous motor＇ s motion. Therefore, the motor can quickly follow and run according to the set curve. PVI is easy for the communication the PCC and computer. PowerLink makes the communication more quickly. The C language makes the PCC can complete some advanced application that the traditional PLC can not realize, such as the form of the curve. Furthermore, the induction of the VAXIS improves the performance of the motor＇s motion.
出处
《电气应用》
北大核心
2006年第5期76-79,83,共5页
Electrotechnical Application
