三维磁敏传感器的设计及误差分析

Design and Error Analyses of 3D Magnetic Sensor

采用三维磁敏传感器有助于降低磁场测量系统的复杂性和提高磁场测量速度。介绍了基于霍尔元件的三维磁敏传感器的设计方法,分析了霍尔元件的粘贴角度偏差、传感器的体积对测量精度的影响,并对传感器的总体误差进行了估算,其分析结果对三维集成磁敏传感器的设计具有指导意义。

The adopt of 3D magnetic sensor is beneficial to reducing the complexity of magnetic field measurement system and increasing magnetic field measurement speed. A design method of 3D magnetic sensor based on hall devices is introduced. The influence of the hall devices＇ stickup angel error as well as the bulk of the sensor is analyzed and the total error of the sensor is calculated. The analysis results have directive meaning to the design of 3D integrated magnetic sensors.