超精密微操作器设计和建模研究

Design and Model of an Ultra-Precision Micromanipulator

通过分析单、双平行机构的优缺点,设计了一种低耦合位移和集中应力的复合四杆机构微操作器,建立了集中应力模型,并利用拉格朗日等式对其动态特性进行了建模研究;采用有限元方法对微操作器进行了静态和动态分析,并对其静、动态特性进行了试验测试。解析模型、有限元仿真与实验结果的一致证明了解析模型的正确性,为微操作器的设计提供了简单可靠的设计方法和理论依据。

A four-bar and a double four-bar parallel micromanipulator were analyzed, and a compound fourbar parallel micromanipulator was designed by using the merits of two micromanipulators and wiping off their demerits. In order to analysis the performance of the compound four-bar parallel micromanipulator, its concentrated stress model is analyzed and dynamic characteristic is modeled by using of Lagrange equation. For validating the theoretical analysis, finite element simulation and experiment of static and dynamic model were conducted, and the correspondence among analytical model, finite element simulation and experimental results proved theoretical analysis to be correct. The obtained static and dynamic model is used to establish a theoretical limit for the design of micromanipulator.