摘要
本文从振动对多丝切割机切割硅片的质量影响出发,对加工区域内的受力进行了一定的分析,同时基于对系统的分析,采用Hamilton原则进行系统建模,并且利用有限元方法对系统求解,得出了不同系统参数对系统固有特性的影响。并提出了系统参数的一般设置,达到了预期的效果。
In this paper,the author first presents the quality impact of vibration on multi wire saw used to cut silicon,and analyzes some forces in the processing areas. Based the analysis of the system,the author models the system with Hamilton principle,and analyzes it with the finite element method. Results about the effects about different parameters on the natural frequency are given. And at last,the work gives the general setting about the system parameters,and it reaches anticipated results.
出处
《机电工程技术》
2006年第6期40-42,共3页
Mechanical & Electrical Engineering Technology
关键词
振动
张力
有限元
vibration
tension
the finite element
