微梁传感器弹性模量的测试

Measuring the mechanical properties of micro-cantilever sensors

利用一种静态和两种动态的检测技术,对红外辐射探测微悬臂梁式传感器材料的弹性模量进行了测试研究.在静态检测实验中,利用纳米硬度计直接测出传感器材料的弹性模量;在动态实验中,分别利用谱平面光学滤波法和多普勒测振仪得到微悬臂梁传感器结构的固有频率,再结合数值模拟计算求出传感器的等效弹性模量.通过几种检测结果的分析和比较,获得了更加精确的微梁传感器单元的弹性模量值,为微梁的优化设计和评估提供了可靠的参数.

The elastic modulus of infrared detective micro-cantilever sensors was measured by three different methods-one static and two dynamic measurements. The modulus of the sensor was measured directly by nano-indenter in the static measurement. In the dynamic measurement, the nature frequency of the sensor was measured firstly by optical filtering in the plane of wave spectrum and Doppler scanning vibrometer. In combination with the numerical simulation method, the equivalent elastic modulus of the sensor was calculated. More precise value was obtained in comparison with the other measurement methods tested, thus providing reliable data for the optimal design and evaluation of micro-cantilever sensors.