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Comparison of ZnO Films Grown on before- and after-vapor Transport Equilibration (VTE) LiAlO_2 Substrates by Pulsed Laser Deposition (PLD)

Comparison of ZnO Films Grown on before- and after-vapor Transport Equilibration (VTE) LiAlO_2 Substrates by Pulsed Laser Deposition (PLD)
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摘要 About φ45 mm LiAlO2 single crystal was grown by Czochralski (Cz) technique. However, the full-width at half-maximum (FWHM) value was high to 116.9 arcsec. After three vapor transport equilibration (VTE) processes, we can obtain high-quality LiAlO2 slice with the FWHM value of 44.2 arcsec. ZnO films were fabricated on as-grown slices and after-VTE ones by pulsed laser deposition (PLD). It was found that ZnO films on the two slices have similar crystallinity, optical transmittance and optical band gap at room temperature. These results not only show that LAO substrate is suitable for ZnO growth, but also prove that the crystal quality of LAO substrate slightly affects the structural and optical properties of ZnO film. About φ45 mm LiAlO2 single crystal was grown by Czochralski (Cz) technique. However, the full-width at half-maximum (FWHM) value was high to 116.9 arcsec. After three vapor transport equilibration (VTE) processes, we can obtain high-quality LiAlO2 slice with the FWHM value of 44.2 arcsec. ZnO films were fabricated on as-grown slices and after-VTE ones by pulsed laser deposition (PLD). It was found that ZnO films on the two slices have similar crystallinity, optical transmittance and optical band gap at room temperature. These results not only show that LAO substrate is suitable for ZnO growth, but also prove that the crystal quality of LAO substrate slightly affects the structural and optical properties of ZnO film.
出处 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第3期333-335,共3页 材料科学技术(英文版)
关键词 Crystal structure Pulsed laser deposition ZnO films Vapor transport equilibration (VTE) Crystal structure Pulsed laser deposition ZnO films Vapor transport equilibration (VTE)
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